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<專題討論>2021/5/6(四)14:10綜合大樓2樓48218教室演講 : 謝伯宗 博士兼任執行長(成功大學核心設施中心)

張貼者:2021年5月3日 下午7:20Dabby Lu
講題: 微奈米製程與檢測技術於薄膜工程之應用
摘要:  Core Facility Center (CFC) is one of the university research centers of National Cheng Kung University (NCKU). To support the leading-edge researches, CFC setup a platform with high-end process and inspection tools, and the advanced analytical instruments. Through the public and professional platform, CFC provides its service through either OEM or self-operation modes, all under the E-management booking system. Moreover, through the services provided to both the academic and the industry, CFC plays a platform role for Industry-Academics collaboration with the backup of top-ranked researches in NCKU. 
        This talk will cover the process and analytical techniques of thin film, which is applied on semiconductor, optoelectronics, material science, bioengineering, and so on. CFC can provide complete thin film deposition and patterning process, and also the precise analyzing techniques for the thin film layer. The mechanism of various thin film deposition process, such as sputtering, evaporation, and ALD will be discussed to help understanding the surface growth engineering. Through the analytical instruments to understand the physical, chemical, structural, mechanical, and optical characteristics of the deposited thin film layers.
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Dabby Lu,
2021年5月3日 下午7:21
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